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China fabs acquired 343 immersion DUV lithography tools by early 2026
The Center for Technology and Statecraft report, co authored by former US export control officials, urged Washington and allies to consider a complete export blockade for the tools.
Chinese semiconductor plants have amassed a large inventory of immersion deep ultraviolet lithography systems, adding to pressure in Washington for tighter export controls, according to a report cited by South China Morning Post.
The study from the Center for Technology and Statecraft estimates that Chinese owned fabs acquired about 343 immersion DUV lithography systems by early 2026, with the machines representing billions of dollars in value, the outlet said.
The report was published in late September and co authored by former US export control official Nicholas Brown and Saif Khan, a former White House and commerce department technology policy adviser, SCMP Economy reported.
It highlights a renewed debate among US policymakers and allies over whether the West should move toward a total blockade on immersion DUV tools bound for China, based on the scale of acquisitions described in the study.